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In vacuum brazing, the filler metal, is put in between two base materials that will be jointed. The filler metal will be melted subsequently in the vacuum furnace. The molten filler metal will spread in between the two solid base materials by Capillary and Wetting Effect, and then metallurgical bonding with the base materials. The two base materials joint complete after cooling.
1
Filler Melting
2
Capillary Action
3
Wetting Behavior
4
Cooling & Solidify
5
Brazing
Application
◎Parts of Semiconductor Process Equipments(Showerhead, Cooler,etc.)
◎Target Backing Plate
◎Cooling plate
◎Heat dissipation (pin fin for heat fin, high-power thermal module, etc.)
◎Wide area 2 dimensional joint
Properties
◎Joint of similar materials, including active metal(EX: Al, Ti, etc.)
◎Joint of heterogeneous materials, including metal and ceramic
◎No oxidation, high precision, high strength
Application
Al, Cu and alloy vacuum brazing interface
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Al-Al Brazing
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Cu-Cu Brazing
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Cu-Al Brazing
