0-100mm
0.1μm ;can be switched to 0.05μm, 0.1μm, 0.5μm or 5μm
3 μm
500 mm/sec. or less
Down direction 125 to 185 gf (variable to sbout 45gf)lateral direction 65 to 125 gf
RS-232C and dedicated print output
0 to +40℃
Approx. 610g